Introduction

FIB Micro Pillar Preparation is a technique for creating small, precise columnar structures on the surface of a sample that can be accomplished using a focused ion beam (FIB) instrument. This technique can be used in a variety of applications including microelectromechanical systems (MEMS), microfluidics and nanotechnology.

Representive Results

1. SEM morphology and stress-strain response curves of BTO single crystal micro-nanopillars of different diameter

2. (A)Fatigue test results of BTO micro-columns (Φ = 0.58 μm); (B) and (C) comparison of the morphology of micro-columns before and after fatigue tests; (D) strength test results of different diameters of BTO.

Sample Requirement

1. The sample should be a hard solid material, such as metal, semiconductor, ceramic, glass, etc.

2. The surface of the sample should be flat and smooth, with no obvious defectssuch as dents, pores, cracks, etc., to ensure that the prepared micro-columns are of good quality.

3. The sample size should be large enough to allow for cutting and preparation of the microcolumn. Sample sizes of at least a few millimetres to a dozen millimetres are usually required.

4. The sample needs to be secured to the sample holder so that it remains stable during the preparation process.

5. Samples need to be pre-treated, such as sanding and polishing, to reduce surface roughness and remove surface contaminants to ensure the quality and shape of the prepared micro-columns.