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Introduction

Glow Discharge Mass Spectrometry (GD-MS) is an advanced analytical technique used for the direct analysis of solid materials. It is especially effective for detecting and quantifying trace and ultra-trace elements in metals, semiconductors, and other inorganic solids.

Key Feature

Direct Solid Sampling: No need to dissolve or chemically prepare the sample, reducing contamination risks.
High Sensitivity: Capable of detecting elements at very low concentrations (down to parts per billion or lower).
Wide Elemental Coverage: Can analyze almost all elements in the periodic table simultaneously.
Quantitative Analysis: Provides accurate measurements of elemental concentrations.

Principle

Principle: In the glow discharge ion source (GD source), an inert gas—typically argon at a pressure of 10–100 Pa—is ionized under a high voltage of several thousand volts. The resulting argon ions bombard the surface of the sample, causing atoms to be sputtered from the sample into the plasma, where they are further ionized. These ions are then collected and analyzed by the mass spectrometer.
Principle of High Sensitivity: Glow discharge operates at low pressure, generating a large number of electrons and metastable inert gas atoms. These frequently collide with sample atoms, resulting in efficient sputtering and ionization.
Principle of Wide Elemental Coverage: The GD source demonstrates minimal variation in response between different elements and provides an exceptionally wide linear dynamic range.

Detection Principle: GD-MS-Detects ions with a mass spectrometer; GD-OES-Detects photons emitted by excited atoms using optical emission spectroscopy.
Sensitivity: GD-MS＞GD-OES
Element Coverage: GD--MS＞GD-OES
Analysis Time: GD-MS＞GD-OES
Depth Profiling: GD-MS＜GD-OES
Cost: GD-MS＞GD-OES.

Yes, there are a total of 74 elements, excluding inert elements, CNOH gas elements, radioactive elements, and other unstable elements. GDMS can yield semi-quantitative data for these elements.

The accuracy of GDMS testing is generally high, but it can vary based on several factors:

Sample Homogeneity: Inhomogeneous samples may lead to variations in results
Elemental Sensitivity: GDMS is particularly effective for detecting trace elements, but the accuracy can differ among elements due to ionization efficiency.
Matrix Effects: The presence of other elements in the sample can influence the ionization process, potentially affecting accuracy.

Application

Applicable industries

Industrial Applications

Semiconductor manufacturing: purity analysis of silicon wafers, compound semiconductors, and related materials
Electronics: quality control of electronic materials and components
Metallurgy and high-purity metals: certification and quality assurance of metals and alloys.
Aerospace and defense: purity analysis of silicon wafers, compound semiconductors, and related materials
Electronics: quality control of electronic materials and components
Energy: solar cells, batteries, and nuclear applications

Applicable materials type

High-purity metals: copper, aluminum, titanium, and their alloys
Semiconductor materials: silicon, germanium, and compound semiconductors
Other Materials: Graphene, Caborn

Example of GDMS result table (High purity graphite)

Element	mg/kg	Element	mg/kg	Element	mg/kg	Element	mg/kg
Li	0.01	V	0.01	Y	0.05	Ba	0.05
Be	0.05	Cr	0.1	Zr	0.05	La	0.05
B	0.01	Mn	0.05	Nb	0.05	Ce	0.05
F	0.5	Fe	0.01	Mo	0.05	Pr	0.01
Na	0.05	Co	0.01	Ru	0.05	Nd	0.05
Mg	0.01	Ni	0.01	Rh	0.01	Sm	0.01
Al	0.05	Cu	0.05	Pd	0.05	Eu	0.01
Si	0.05	Zn	0.05	Ag	0.05	Gd	0.05
P	0.01	Ga	0.01	Cd	0.05	Tb	0.01
S	0.05	Ge	0.05	In	0.05	Dy	0.01
Cl	0.05	As	0.05	Sn	0.05	Ho	0.05
K	0.01	Se	0.05	Sb	0.05	Er	0.05
Ca	0.01	Br	0.05	Te	0.05	Tm	0.01
Sc	0.01	Rb	0.05	I	0.05	Yb	0.01
Ti	0.01	Sr	0.05	Cs	0.01	-	-

Report Interpretation

This report presents an analysis of the Glow Discharge Mass Spectrometry (GDMS) results for high purity graphite, focusing on impurity detection. While the primary element, carbon, is not included in this table, the analysis of trace and contaminant elements is crucial for assessing the purity and quality of the graphite sample. The GDMS analysis identified various elements present in the high purity graphite sample, measured in mg/kg. The key findings are summarized below:

-Trace Elements: The analysis detected several trace elements, including lithium (Li), boron (B), sodium (Na), magnesium (Mg), aluminum (Al), silicon (Si), phosphorus (P), sulfur (S), and calcium (Ca). These elements are typically considered impurities in high purity graphite.

Please follow these guidelines for optimal testing:

For Bulk minimum size: 3×3×3 mm maximum size: 50×50×50 mm Roughness: RA＜3μm
For Powder weight: 10g particle size: Finer powder particles are preferred
For Needle-shaped Sample size : 2mm x 2mm x 22mm
Other Notes
- sputtering diameter: 8 mm, micro-destructive test
- sputtering depth: ranges from a few microns to tens of microns
- risky materials: nanomaterials
- purity: 3N~8N

-Contaminants: The presence of contaminants such as chromium (Cr), iron (Fe), nickel (Ni), copper (Cu), arsenic (As), lead (Pb), and mercury (Hg) was also noted. These elements can significantly impact the performance and suitability of graphite for various applications.

The elemental composition of high purity graphite is critical for its applications in electronics, batteries, and other high-tech industries. The low concentrations of trace elements indicate that the graphite is largely pure; however, the presence of contaminants is a concern.

Glow Discharge Mass Spectrometry (GD-MS) is a sensitive analytical technique used to determine the elemental composition of solid materials. By using a glow discharge plasma to ionize atoms from a sample’s surface, GD-MS enables direct, rapid, and accurate analysis of trace and ultra-trace elements, making it especially valuable for high-purity metals, alloys, and other inorganic solids.

Regulatory testing

Environmental testing

Data analysis

Regulatory testing

Environmental testing

Data analysis

Sample Requirements

Application Case

Example Result

What our customers are saying

Need precise analysis? Contact us – we'll help you choose the best solution for your needs.

Frequently Asked Questions

Glow Discharge Mass Spectrometry(GD-MS)

Variant (SKU)

Introduction

Introduction

Key Feature

Principle

Application

Applicable industries

Industrial Applications

Applicable materials type

Applicable materials type

Example of GDMS result table (High purity graphite)

Report Interpretation

Please follow these guidelines for optimal testing:

Regulatory testing

Environmental testing

Data analysis

Regulatory testing

Environmental testing

Data analysis

Sample Requirements

Application Case

Example Result

What our customers are saying

Need precise analysis? Contact us – we'll help you choose the best solution for your needs.

Frequently Asked Questions

Glow Discharge Mass Spectrometry(GD-MS)

Variant (SKU)

Introduction

Introduction

Key Feature

Principle

What is the difference between GD-MS and GD-OES?

Is the detectable element range from Li to U? Is it a semi-quantitative analysis?

How accurate are the results?

Application

Applicable industries

Industrial Applications

Applicable materials type

Applicable materials type

Example of GDMS result table (High purity graphite)

Report Interpretation

Please follow these guidelines for optimal testing: